Improved anti-stiction coating of SU-8 molds - ScienceDirect
Research
Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments - ScienceDirect
Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments - ScienceDirect
IR microscope image of lateral anti-stiction MEMS test structures: a... | Download Scientific Diagram
Stiction and anti-stiction in MEMS and NEMS
Mems stiction and anti stiction
Mems stiction and anti stiction
![PDF] Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD) | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/258e2b43c99abee6e5c9796e40992d278cb3e482/2-Table1-1.png "PDF] Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD) | Semantic Scholar")
PDF] Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD) | Semantic Scholar
APPLICATION BRIEF MVD Anti-stiction Coating for MEMS
Figure 2 from Characterization of anti-stiction coatings for MEMS applications | Semantic Scholar
Controlling Stiction in Nano-Electro-Mechanical Systems Using Liquid Crystals | ACS Nano
![PDF] Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/c3412405e6de48d2acb34eaac695f7cfe355f37c/2-Figure1-1.png "PDF] Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments | Semantic Scholar")
PDF] Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments | Semantic Scholar
PDF) Vapor phase anti-stiction coatings for MEMS
Anti-stiction coating for mechanically tunable photonic crystal devices
Aging of self-assembled monolayers for anti-stiction coatings studied by near edge x-ray absorption fine structure
anti-stiction coatings for MEMS
![PDF] Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments | Semantic Scholar](https://d3i71xaburhd42.cloudfront.net/c3412405e6de48d2acb34eaac695f7cfe355f37c/2-Figure2-1.png "PDF] Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments | Semantic Scholar")
PDF] Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments | Semantic Scholar
Vapor-Phase Self-Assembled Monolayers for Anti-Stiction Applications in MEMS
Vapor phase anti-stiction coatings for MEMS
Figure 1 from Characterization of anti-stiction coatings for MEMS applications | Semantic Scholar
US20120244677A1 - Method and apparatus for selectively removing anti-stiction coating - Google Patents
Figure 4 from Characterization of anti-stiction coatings for MEMS applications | Semantic Scholar
Mems stiction and anti stiction
PDF) Anti-stiction coatings for MEMS devices
![Rough anti-stiction layer for MEMS device Patent Grant Chen , et al. Sep [Taiwan Semiconductor Manufacturing Co., Ltd.]](https://uspto.report/patent/grant/10759654/US10759654-20200901-D00001.png "Rough anti-stiction layer for MEMS device Patent Grant Chen , et al. Sep [Taiwan Semiconductor Manufacturing Co., Ltd.]")